Integrated measurement Roughness Profile Integrated Measuring Equipment
Negotiable
Min.Order:1
Shenzhen Ruicheng Technology Co., Ltd.
Model | SPR | ||
Measuring range | X axis | 100mm | |
2 | Z axis | 320mm | |
3 | Z1 axis | C: ±12.5mm/R; ±420um | |
Contour accuracy | Z1 Linear accuracy | ±(1.5+I0.2HI) um | |
5 | Arc | ±(2+R/8) um | |
6 | Straightness | 0.8um/100mm | |
7 | Angle | ±2' | |
Roughness accuracy | Linear accuracy | ±4% | |
Residual noise | ≤0.02um | ||
Repeatability | ≤2nm | ||
Cutoff wavelength | 0.025, 0.08, 0.25, 0.8, 2.5, 8mm | ||
Driving speed | X axis | 0.1~10mm/s | |
Z axis | 0.5~10mm/s |