1. Description The HMPS-2060SP, 6kW microwave plasma chemical vapor deposition (MPCVD) equipment is designed for multi-purpose with high stable and medium process pressure microwave plasma based on uses’ specific requirements. The system is built with advanced performance, perfect function, reasonable structure, ease of use, safety and reliability and great appearance, with all the characteristics it is especially suitable for the application of CVD progress of monocrystalline and polycrystalline diamond film. Chemical vapor deposition (CVD) of polycrystalline diamond film, surface treatment and modification of materials, as well as the growth of low temperature oxides.
2. Equipment composition and main features: 2.1. Microwave power generator The system uses a newly developed 6kW/2450MHz solid-state microwave power generator. The microwave power is continuously adjustable from 0.1-6kW; the stability is better than ±1%; the ripple is better than 1%, and it has good control performance; the PLC provides convenient control; the perfect line safety blocking control system is adopted to make the system has a long service life. It has excellent electrical performance, safe and reliable, simple and convenient operation.
2.2. Waveguide transmission unit The system uses an excellent microwave transmission system consisting of a high-performance microwave circulator, three-stub tuner, water load with reflected wave sampling, and a waveguide connected to the waveguide section. It ensures the good isolation of the reflected wave from the solid-state power source to make it work stably. Can easily adjust the best match when the plasma load changes, to achieve the best transmission of microwave power. And through the reflected wave sampling, the reflected power and real - time working status are displayed in digital form.
2.3. Mode transformation and betting microwave coupling cavity This is our new generation of relatively mature microwave mode conversion and coupling cavity, which is composed of a cylindrical cavity working in TM mode, a door-type coaxial waveguide coupler with adjustable coaxial coupling probe, and a plate quartz window. By adjusting the short-circuit piston of waveguide and coaxial coupling probe, the microwave power can be coupled to the plasma discharge chamber efficiently in a wide range of operation, and high-density, high-ionization, large area of uniform and stable microwave discharge can be generated. It adopts double-layer water-cooled cavity wall to ensure stable operation.
