Spin Coater for max 8 inch
USD $1680 - $5750 /Set
Min.Order:1 Set
ZHENGZHOU CHUANGDA LABORATORY EQUIPMENT CO.,LTD
2.Matrial:Anodic Oxidation Aluminium Shell,
3.With three pieces aluminium vacuum chuck: 0D8mm,15mm,55mm
4.7"LCD Panel with Enghlish Instruction Manual Book5.Oiless vacuum pump with low noise
6.Servo motor, more stability
Technical Parameter
Model No. | AC200 |
Chamber Size | 210mm |
Maximum wafer sample | 8 inch (200mm) |
Chamber material | HDPE |
Vacuum Chuck | 3 pieces standard vacuum chuck Size: O.D8mm, 15mm,55mm for immediately using ***Customized vacuum chuck is availiable*** |
Spin Speed | 100~12000RPM |
Acceleration adjustable range | 0~50000-rpm/s |
Each step max coating time | 3000s |
Servo motor power | 200w |
Spin Control | Programmable control,100programmable with each 100steps can restore |
Spin Resolution | 1 rpm |
Power supply | AC110-230V, adjustable |
Dimension | 433*306*306mm |