GSL-1100X-III-D11-8 double tube three temperature zone tube furnace

Introduction:

1100°C double-tube, three-temperature zone tube furnace (graphene growth) GSL-1100X-III-D11-8 outer furnace tube diameter up to 11", inner tube diameter 8.5", equipped with a pair of high vacuum stainless steel flanges at one end of the heating tube The flanges are equipped with mechanical pressure gauges and valves. Three temperature zones are equipped with a 30-segment programmable digital temperature controller and equipped with a K-type thermocouple for temperature measurement, specifically for the growth of thin film materials on metal foils.

Features

1, double shell, with air cooling system, shell temperature <70 °C. Inner furnace is made of high-purity alumina material, which can minimize the loss of energy.

2, using stainless steel vacuum seal flange, use silicone seals to seal.

3, using three PID controllers, you can set 30 paragraphs of heating and cooling procedures.

4. The quartz tube must be placed in the tube before heating to prevent the heat from dissipating in the form of heat radiation.

5. Use the inner tube for film growth to place a maximum of 8" substrate.

6, has passed CE certification.

Technical Parameters:

Power supply: Single phase AC 220V 50Hz/60Hz 8KW (50A air switch required)

Quartz tube: outer diameter Ø279mm, inner diameter Ø269mm, length 1300mm, both ends open, flanges can be connected

Inner tube outer diameter Ø216mm, inner diameter Ø206mm, length 750mm, one end closed, one end connected to gas inlet and outlet

Heating element: NiCrAl resistance wire

Heating area: length 900mm

Temperature zone: 3, each 300mm long

Constant temperature area: 500mm (the same temperature is set in three temperature zones)

Working temperature: up to 1100°C(<1h), continuous working 200°C-1000°C

Maximum cooling rate: 10°C/min

Thermocouples: 3, Type K

Temperature control accuracy: ±1°C

Vacuum degree: 10-2torr (mechanical pump)

Flange: The left flange includes the chemical vapor deposition inlet and cooling gas inlet and outlet, and the right flange has KF-40 vacuum interface and vacuum valve

Size: Does not include vacuum flange 1300mm × 623mm × 940mm, including vacuum flange 1670mm × 623mm × 940mm

Weight: 200kg

Optional accessories

1, quartz tube plugging

2, PC temperature control software

3, KF-40 to KF-25 connector