Furnace and Preheater

• Compact CVD furnace system is modified from OTF-1200X-100 single zone tube furnace:
• o    4.33" O.D x 4.05" I.D x 29.13" Length quartz tube
• o    1100ºC Max. working temperature
• o    Water cooling flange on right-side is slidable for easy sample loading
• o    Water cooling flange on left-side between the heater and furnace is used for pre-heated

gas input and sealing

• Four channel gas inlet ( 1/8" Dia tube and tube fitting) are built in on the left side flange
• One small heater is attached to the left side flange of the furnace to preheat input gas,

 liquid,  or evaporate solid chemical, which will be then delivered to CVD furnace:

Please click picture left for more details:

• o    1.2''O.D x 6''L SS tube as heating chamber
• o    600ºC Max. working temperature
• o    Flange on left side is for gas sealing and input

Rated Voltage

Single Phase, 220V AC, 50/60 Hz, AWG 8# Power cord is included (without plug)

Power consumption

Max. 3600 W (20 A breaker required)

Heating Zone

• CVD Furnace:  440 mm
• Constant temperature zone: 100 mm 
• Gas Heater:     150mm

Working Temperature

• CVD Furnace:
• o    Max heating temperature: 1100°C ( < 2 hour )
• o    Continuous working temperature: 200~1000°C
• o    Max heating & cooling rate: 20°C/min
• Heater: 
• o    Continuous working temperature: RT~600°C
• o    Max heating & cooling rate: 20°C/min

Temperature Control

• CVD Furnace and Heater (separate temp control):
• o    Digital controllers with PID/self-tuning functions and 30 segments programmable
• o    Thermocouple:  K type thermocouples, which feed through the right side flange and

control furnace temperature.

• o    Control accuracy: +/- 1°C
• o    Software for PC control furnace is available as optional (click picture below to order)
• o    The new version of PC module is now compatible with Lab View 05/08/2014

Vacuum
and Gas Sealing & Flange

• CVD Furnace:
• o    Right flange:
• §  Water cooling to prevent sealing o-ring from melting (water cooler is not included,

please click water chiller to order)

• §  KF25 vacuum fitting (to vacuum pump, please click to order pump,  vacuum hose,

valve and sealing gasket)

• §  Slidable for customer to easily and fast push/pull in/out sample
• §  One quartz wafer holder ( 3" Dia. ) is included and the flange with heating radiation

block to hold nanowire growth substrate

• §  An anti-corrosive capacitance diaphragm gauge is included
• o    Left flange (between CVD Furnace and Heater) with four 1/8'' Swagelok fittings for

1/8'' tube:

• §  Two separate 1/8'' fitting on the flange for independently and directly delivering any

 gas into the CVD furnace 

• §  One 1/8'' fitting for delivering heated gas from heater to CVD furnace
• §  One 1/4'' fitting for bypassing the gas (without heating) to the CVD furnace (inside 

the CVD furnace, the gas tube is merged with heated gas pipe by a T fitting)

• §  Note: How gas pipe assembled in the CVD furnace through above 1/8'' fitting:
• §  One 1/4'' quartz tube deliver the heated gas from heater (also the bypass gas by a

T fitting)

• §  Two 1/4'' quartz tube delivery extra gas via the two separate 1/8'' fitting on the big 

furnace left flange

• §  These three 1/4'' quartz tubes inside CVD furnace is in parallel and vertically 1'' higher

 than sample holder

• §   These three 1/4'' quartz tubes can be easily removed to clean or replaced once get

 stuck or corroded

• Heater:
• o    Left flange: one 1/8'' gas fitting to deliver gas to heater for pre-heating and then to

 CVD furnace 

• o    On the right side to CVD furnace with necessary thermal block material to minimize

 the temperature gradient at the interface between heater and CVD furnace

• o    Furnace Chamber Installation
• o    2 1/4" pipe adapter are installed on each flange

Net weight

110kg

Dimensions

• Standard:    62"L X 18"W X 23"H
• Maximum:   80"L X 18"W X 32"H  (Lid open and right-side flange slided out)

Warranty

• One year limited warranty for electrical parts. ( Consumable parts such as processing

 tubes, o-rings and etc are not covered by the warranty)

Compliance

• CE Certified
• All electric components ( >24V) are UL / MET / CSA certified
• The furnace is ready to pass TUV(UL61010)  or CSA certification at extra cost.

Warning

• The tube furnaces with quartz tube are designed for using under vacuum and low

 pressure <0.2 bars / 3 psi / 0.02 Mpa

• Attention: A two-stage pressure regulator must be installed on the gas cylinder to

limit the pressure to below 3 PSI for safe operation.

• Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may

 only be safely used up to 1000°C 

• The flow rate for gasses should be limited to<200 SCCM (or 200ml/min)

for reducing thermal shoc