Product Details
The mid-frequency magnetron sputtering technology is another new milestone in the vacuum field. It is the ideal equipment for preparing high quality films of compound and oxide. The equipment has high deposition rates, overcomes striking arc and uses for preparing the films of ITO, AL2O3, SiO2, TiO2, Si3N4, etc. When it is equipped with the several targets and film thickness monitor, it can make the multi-layer films.