odel CV-1 CV-2
note  single one side  or double side
Cleanliness Dust with particle diameter≥0.5μm within the area should ≤3.5
  piece/liter(class 100 of FS209E)
Average wind speed 0.3m/s～0.6 m/s
Noise ≤62db(A)
Vibration half speak value ≤3μm ≤4μm
Illumination ≥300Lx
Power Supply AV 220V±10% 50HZ±2HZ
Maximum power 380W 680W
Size of work area (W×D×H) 820×610×520mm 1200×530×520mm
Size of outer (W×D×H) 980×715×1620mm 1360×715×1620mm
Weight 146kg 200kg