1.Introduction of two main type

A) Dry Exhaust Gas Scrubber:Dry scrubber use a catalyst toremove toxic components by chemisorption or adsorption to their surface. Therequired contact time is very short and does not depend on the inlet concentration.When most of the material has reacted, the cartridge with the catalyst has tobe exchanged. This abatement method can be used for almost all processes usedin the microelectronic industry. It does not require power, gases, or water forthe gas cleaning. However, it requires maintenance. The catalyst has toexchanged regularly and the waste material has to be disposed. Adsorbermaterial mixed with some color agent or indicator is used to indicate in aspecial window, when 90% of the catalyst has been used and the material needsto be exchanged. It is possible to install an automatic alarm based on anelectronic color sensor.

B) Wet Exhaust Gas Cleaning:A wet scrubber is a simple method to clean exhaustair or exhaust gas and remove toxic or smelling compounds. In the flue gasscrubber, the gas gets in close contact with fine water drops in a co-currentor counter current flow. This method is more effective when the water drop sizegets smaller and the total surface between water or washing fluid and the gasgets larger. The water or washing fluid is recirculated normally in order tosave water and reduce the amount of waste water.

2.Application:

Acid gas: sulfuric acid, HLC,nitric acid, HF etc.

Alkali gas: NAOH, KOH,NHS etc.

Organic gas: benzenes,alcohols, phenols.

We used differentabsorption solvent for dealing with different harmful gas.