ITO Film Coating Machine, Bath Type ITO film Magnetron Sputtering Coater; Glass ITO Deposition Machine

Standard applications:  PET, glass, to generate ITO coating layers.  

Machine Built Time:  2012, China.

Application: AR film, ITO film. 

 Work Pieces:

Size: 300mm*100mm

Thickness of PET: 0.175mm0.05mm

*Thickness of ITO Film:185nm5nm

Sheet resistance: 6~8ohm/sq

Technical Configurations: 

1) DC Sputtering Sources:  Cu, Al, ITO 

2) MF Sputtering Sources

3) Turbo Molecular pump + Backing Pump group 

4) High-intensity magnetic field to improve ITO film quality,   target utilization rate >30%

5) Cu, Al, Si targets utilization rate > 35%

6) Deposition Rate: 30nm m/min ~ 40nm m/min 

7) Sputtering Uniformity Area: 350mm 

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VAKIA-MSC Standard Specifications

Coating Samples

Please contact us for more information, Vakia Vacuum Coating is honored to be your your business partner.