Product Details

PVD Sputtering Deposition Tool Machine

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Set up of arc deposition system:

Door

Chamber

High vacuum pumping system

Vacuum measuring and control

Fixtures moving system(Custom made)

Sputtering cathodes device

Control unit of the system

Double Stainless steel liner set

Bias power source

Iron frame

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This is a new arc ion plating system specially designed for tool coating. The vacuum chamber is a vertical barrel with a front door.

Vacuum Chamber:

Chamber cover can be disassemble and has a workpiece jig on it. There is a front door on chamber for loading and unloading of workpieces. There is one observation port on the door.

The chamber body and front door are whole water jacket structured and made of stainless steel.

There is a square-shaped flange hole for connection with vacuum system. On barrel bottom,

there are several flanges: one for installation of heater, two for gas supply and one for thermocouple.

Inside the barrel, there is a stainless neck bush to keep chamber clean. It is easily disassemble and convenient for regular clean.

The chamber is placed on a rectangle chassis which has gas supply system, side water cooling system, cables of system control and power supply. The chassis is made of carbon steel and painted with anti-corrosive paint.

Vacuum Degassing System

Vacuum system consists of following devices to meet requirement of pump down.

Rotary vane vacuum pump

Oil diffusion pump(ODP)

Roots pump

Besides pumps, the system also has valves, connecting popes,cryotrapping and instruments for measurement. Instruments for measurement is a thermocouple and ionization combined pressure gauge with pressure range 10^-3 Pa to 10^-4 Pa. It can switch from thermocouple gauge to ionization gauge automatically.

Gas supply system

Two or three kinds of gases can be inlet into the system for plating. Each inlet has necessary stop valve and control flow controller. Flow range is 0 to 500sccm for each inlet.

Heating System

The system has a tube-shaped heater and connected power

Temperature measurement

Temperature measurement is by thermocouple thermosistor placed inside vacuum chamber. It can detect environment temperature of chamber. For detecting surface temperature of workpiece, customer can choose infrared thermosistor.

Control System

There are two control systems for customer's choice: semi-automatic control or automatic control.

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Titanium Nitride (TiN)

Coating	Titanium Nitride
Color	Gold
Structure	Multi-layered
Microhardness	2200HV 0.05
Applications	A general-purpose coating allowing higher speeds and longer tool life. Effective in a wide area of metal cutting operations

Titanium Carbonitride (TiCN)

Coating	Titanium Carbonitride
Color	Violet-Brown
Structure	Multi-layered
Microhardness	3000HV 0.05
Applications	A harder, more lubricious coating offering better performance in steels over HRc 40 and aluminum alloys.

Aluminum Titanium Nitride (AlTiN)

Coating	Aluminum Titanium Nitride
Color	Dark Gray-Black
Structure	Graded
Microhardness	3300HV 0.05
Applications	The most abrasion resistant and hardest coating. Recommended for the machining of cast iron, hardened die steels up to HRc 60 and other heat resistant alloys.

Titanium DiBoride (TiB2)

Coating	Titanium DiBoride
Color	Light Gray
Structure	Graded
Microhardness	4000 HV
Applications	Our toughest coating ever, recommended for use with silicon aluminum alloys, titanium alloys, magnesium alloys and copper alloys

Our Services

Before sales:

Our engineers are ready to provide custom made design and recommendation for each customer's case.
We provide professional consulting service for PVD coaters and lines.
We also have set up good relations with the suppliers of relative consumables and parts for your needs.

After-sales

We will send the engineers to your place for installation, fine tune and for operation training.
We will provide troubleshooting service all lifetime.
The warranty period of the machine is 1 year.
We will contact you to ask for about the conditions of the machine in periodically.
We also provide the service for further extension on your existing machine.

FAQ

Question 1: I am going to set up a new factory. I don't know anything about the machine. Will you provide the technical support?

Answer: Sure. Every machine will be test before delivery. We will make sure there is no problem for the machine.

You may send 2-3 smart workers to come to our factory to learn how to operate the machine.

When the machine arrives your factory, we will send the experts to your factory to help for installation. Operation training will be provide. It may take about 20-30 days. Maintenance tips will be given.

Also, we provide consulting service for creating the proper facilities for running the machine.

Question 2: What is price of the machine?

Answer:

The machine is custom made. If you have any drawing or any information on specification of the machine, please send to us for quote.

If you are totally new in this area, please tell us the max. dimension of your products, its application, and your desired daily capacity.

We will provide our professional suggestions and work out an appropriate design for your project.

Question 3: What kind of pre-treatment I need to do before the vacuum PVD process?

Answer: In vacuum area, the products(we call it"substrate") have to be CLEAN, DRY AND SMOOTH. So we will need washer and dryer, sometimes base varnish, and topcoat to protect the coatings.

Question 4: Do I have to pay the costs for pollution?

Answer: The machine is environment-friendly, there is no liquid chemical waste and harmful gas. This is a kind of green technology.

Inquiry Guides

Dear Customer: :-)

Good day.

When you are going to send us a inquiry, in order to design the most appropriate machine for your project, please answer the following questions in your letter:

1. What is your product, its material and application

2. What is the possible max. dimension of your product

3. What is your desired productivity per 8 hours/shift.

The answers to the above question will help us a lot on designing or do the recommendation.

Please send the inquiry at the bottom of this page.

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Everything you need to prepare for running the PVD coating machine ESPECIALLY FOR FOR NEW USERS (Please check the specifcations of the involved machines with us)
Sort of machines	Vacuum Metallising Machine	Magnetron Sputtering Machine	Arc Deposition Machine
General needs	Cooling Water for the diffusion pump (Least): Chiller	Cooling Water for the diffusion pump, sputtering cathodes (More):Chiller	Cooling Water for the diffusion pump, arc cathodes, the vacuum chamber (Most):Chiller
	Compressor for the mecahnical pump	Compressor for the mecahnical pump	Compressor for the mecahnical pump
	Electricity Power (Ranges 50-120kW)	Electricity Power (Ranges 50-1500kW)	Electricity Power (Ranges 50-400kW)
Footprint	Please check with us for different designs	Please check with us for different designs	Please check with us for different designs
Materials for the process (Material)	Aluminum filament Tungsten filament	Target material: Titanium, Stainless steel, Chrome, Silver, Copper, Aluminum, ITO, etc	Target material: Titanium, TiAl, AlTi, Chrome, etc
Materials for the process (Gas)	-	Agron Oxygen, Acetylene, Nitrogen, etc (All the tanks for the gases need pressure reducing valves and gas pipes, connectors)	Agron Oxygen, Acetylene, Nitrogen, etc (All the tanks for the gases need pressure reducing valves and gas pipes, connectors)
Operators	1-2	1-6(can be batch type & continuous type)	1-2
Oils	Diffusion pump oil & mechanical pump oil	Diffusion pump oil & mechanical pump oil	Diffusion pump oil & mechanical pump oil
Pretreament machines for the substrates	a. Base varnish & topcoat painting&equipment(UV painting) b. Cleaning & dry	a. Base varnish & topcoat painting&equipment(UV painting) b. Cleaning & dry	a. Ultrasonic Washing Machine b. Polishing Machine(if necessary) c. Oven d. Pure water machine
Other items	Mentioned in the spare parts list	Mentioned in the spare parts list	Mentioned in the spare parts list