Specifications

High Precision
2 Competitive Price
3 Quick Delivery
4 Custom Size Available

Description:

Specifications

Sapphire wafers
1.Dia:50.8,76.2mm,100mm
2.thickness:330/430/500um
3.orientaion:C/R/A/M plane
4.package:clean room

 

  Epi-ready Sapphire wafers(sngle polished or both polished)   

 

Sdhengjing provides sapphire wafer with complete orientation options including C plane , A plane , R plane and M plane , in diameter range  from 1" to 4" , square substrate is also available as well , size from 10 x 10 mm to 100 x 100 mm .

 

 Substrate are produced as per SEMI standards, it has good surface finish Ra < 5A and high cleanliness, we can offer epi ready grade sapphire wafer for your epitaxial growth. Sapphire wafer are produced by Czochralski method, due to it's high strength, high anti-corrosion high anti-abrasion, low dielectric loss and good electrical insulation, single crystal  sapphire wafer plays an increasingly important role as a material for blue LED and high Tc superconductor and microwave applications. Contact us for further information on price & delivery time.

 

 

 

Applications

 

 

 

 sapphire wafer plays an increasingly important role as a material for blue LED and high Tc superconductor

 

 and microwave applications.

 

 

 

 

parameters:

 

 

Crystal Materials	99.995% High Purity, 2-3 Grade Monocrystalline Al2O3
Wafer Surface Orientation	C-axis(0001) offset to M (1-100) / A (11-20) 0.2°±0.05° / 0.3°±0.1° / ±0.25°
Diameter	50.8mm ± 0.1mm / 76.2mm ± 0.25mm / 100.0 ± 0.4mm / 125.0 ± 0.3mm / 150.0 ± 0.3mm
Thickness	330um ± 10um	430um ± 10um	500um ± 15um
Major Flat	A-axis (1 1-2 0) ± 0.2°
Major Flat Length	16.0mm ± 1.0mm / 22.0mm ± 1.0mm / 32.5 ± 1.0mm / 47.5 ± 2.5mm
Minor	None
Front Surface Finish	Epi polished, Ra< 0.20nm
Back Surface	SSP: Fine ground, Ra 0.4 to 1.0um; DSP: Polished
Edge condition	Edge defects not to exceed SEMI M3-91
TTV	<15um	<10um	<10um
BOW	<15um	<10um	<10um
Warp	<15um	<10um	<10um
Bubble & Color	None by visual inspection in intensive light
Ground Boundary	None by visual inspection in fluorescent light
Cleanliness	Free visible contamination
Packaging	Packaged in a class 100 clean room environment, in cassettes of 25pcs or single fluroware, under a nitrogen atmosphere.
Note	R-plane (1-1 0 2), A-plane (1 1-2 0 ), and M-plane(1-1 0 0) are available; Customer's specification not listed above is also available upon request.