Specifications
Turbo Molecular pumpOperating in any position.
High ultimate vacuum degree.
High pumping speed.High compression ratio.
TYFB-600 Molecular pump
TY series of complex molecular pump combined by a turbo molecular pump and disc traction pump, it has the specialty both of them,high pumping seed and high compression ratio,which extends the application range of molecular pump.
The pumped gas compound molecular pump is non-selective, no memory effect, the pump can get clean high vacuum and ultra-high vacuum without cooling well and the oil baffle. It’s widely used in photovoltaics, lighting, aerospace, semiconductor, energy, military, laser, appliances, materials, automobiles and other vacuum technology in various fields.
Tecnology specification list:
Technology Data | TYFB-600 Complex Molecular Pump | TYFB-1200 Complex Molecular Pump | TYFB-1600 Complex Molecular Pump | ||||
High vacuum flange(mm) | 150 CF | 160 ISO-K | 200 CF | 200 ISO-K | 250 CF | 250 ISO-K | |
Foreline flange(mm) | 40 KF | 40 KF | 50 KF | ||||
Pumping seed(L/S) | 600 | 1200 | 1600 | ||||
| N2 | >109 | >109 | >109 | |||
H2 | >8X103 | >1X104 | >1X104 | ||||
Ultimate preesure(Pa) | <8×10-8 | <5×10-7 | <8×10-8 | <5×10-7 | <8×10-8 | <5×10-7 | |
Rotary speed(n/min) | 24000 | 24000 | 21000 | ||||
Vibration values | ≤0.1μm | ≤0.1μm | ≤0.15μm | ||||
Start-up time(min) | <5 | <5 | <6 | ||||
Recommended forepump | 4-8 L/S | 8-15 L/S | 15 L/S | ||||
Cooling type | Cooling(Air-cooled) | Cooling(Air-cooled) | Cooling(Air-cooled) | ||||
Air cooling temperature | ≤25°C | ≤25°C | ≤25°C | ||||
Water cooling temperature | ≤20°C | ≤20°C | ≤20°C | ||||
Water cooling water flow(L/min) | 1 | 1 | 1 | ||||
Balking temperature Pump | <120°C | <120°C | <120°C | ||||
Heater power(w) | <550 | <600 | <700 | ||||
Heater input voltage(v) | AC220 | AC220 | AC220 | ||||
Installing direction | Vertial±5° | Vertial±5° | Vertial±5° | ||||
Weight(kg) | ≈29 | ≈34 | ≈39 | ||||