Model Function | VAKIA-OEC-900 | VAKIA-OEC-1200 | VAKIA-OEC-1350 |
Vacuum Chamber Inner Size | φ900*H1050mm | φ1200*H1250mm | φ1350*H1450mm |
frock clamp | Arch single workpiece tray,satisfy customers’ demand of uniformity to a greater extent,rotate 5 to 30 r/min, Continuously Variable Transmission | 1 Arch single workpiece tray,satisfy customers’ demand of uniformity to a greater extent,rotate 5 to 30 r/min, Continuously Variable Transmission. 2 Arch three workpiece tray,planetary, revolution-autorotation, satisfy customers’ demand of productivity,rotate 5 to 30 r/min, Continuously Variable Transmission |
Vacuum system | Diffusion pump KT-600(VAKIA), Roots Pump ZJ-300, Mechanical pump2X-70, Holding pump2X-8, Pipeline is made of 304 Stainless Steel | Diffusion pump KT-800(VAKIA), Roots Pump ZJ-600, Mechanical pump2X-70, Holding pump2X-8, Pipeline is made of 304 Stainless Steel | Diffusion pump KT-800(VAKIA), Roots Pump ZJ-300, Mechanical pump2X-70, Holding pump2X-15, Pipeline is made of 304 Stainless Steel |
Ultimate Vacuum:superior to 6.0×10-4Pa |
Be equipped with anti-turbulence device,safety interlock, Automatic and Manual operation mode optional |
Heating System | Heating on the thermotube,PID control,highest 350 °C±1.5°C |
Inflation of process gas | Gas mass control meter or gas filled valve Which can be manually fine tuning |
Vacuum Ion bombardment | Direct Current3KV,0.6KW clavate cathode(used for cleaning Workpiece by itself before coating) and gas ion source select |
Evaporation source(selected) | 1 Electron gun:6KW,high pressure4 KV to 10 KV adjustable. Positioning scanning,triangular scanning,circular scanning,spiral scanning,orthogonal scanning,sine wave, focusing capability of beam spot is good,positioning accuracy is high, good reproducibility |
2 crucible:six pointsφ38*20 crucible or four pointsφ38*20 plus anotherpoint arc crucible which center arc length is 87(used for high consumption and low melting point of evaporation material) or crucibleφ48*18 |
Ion source(selected) | 1.5KV hall ion source:used for cleaning before electroplating or assisted deposition,which helped acquiring the higher refractivity,firmness,good compactness and strong adhesion |
Coating control system(selected) | Quartz crystal film thickness control meter:can store up 1 to 99 layer automation coating process,99 kinds of data,is of high precision |
Optical film thickness control meter:adopted multi-wave full spectrum destination analysis technology,judge film layer through the curve analysis of 370 to 870mm transmissivity (or reflectivity) of monitoring chips,can achieve high control precision |