Vakia-1600 Titanium Nitride vacuum Coating Machine
Titanium Nitride
1.Feature:
Good compactness,consistency,smooth,high hardness and strong adhesion
Large area deposotion at low temperature
2.Technical Parameters:
3.Basic Configuration:
Vertical chamber open-door,made of SUS304 stainness steel
Pumping system:mechnical+roots pump+diffusion pump or melecular
Operation at touch screen,controlled by PLC,manual and automatic
The magntron target can be offord:rectangular magntron target,cylindrical magntron target,magntron twin targets.And also the pulse bias supply can be afford.
Alarm at unusual circumatances and taking safty measures
Real-time display various,production process automatic,save parameters
Anode layer ion source
4.Product Description:
Double-door/single door
Occupy Place:W4mxL5m
Total Power:50KW
Size of vacuum Chamber:Ø1250x1500mm
5.Application:
hardware,ceramic,plastic,glass,3c
6.Samples: