Product Details

Product Name

Vacuum magnetron sputtering coating machine

Product Profile

Vacuum magnetron sputtering coating machine is widely used in household appliances, clocks,lamps, crafts, toys, light reflector, phone keypad outer covering, instrumentation, plastics, glass, ceramics, tiles, decorative film and functional film.Our company’s magnetron sputtering coating machine has many advantages such as good controllability and repeatability for film thickness, strong adhesion between substrate and film, special material film coating, mixed film,compound film and TiN imitation gold film making by different materials sputtering on products’ surface at the same time,high purity films etc..

Technical Specification

Type	CK-700	CK-900			CK-1000	CK-1250		CK-1400			CK-1600
Vacuum chamber size	700×H 900mm	900×H 1100mm			1000×H 1200mm	1250×H 1350mm		1400×H 1600mm			1600×H 1800mm
Power supply	Pulse bias power supply; DC magnetron power supply (can be equipped with different power supply by requested)
Vacuum chamber structure	Vertical single/double door, rear vacuum acquisition system
Vacuum chamber material	SUS-304 superior stainless steel
Ultimate vacuum	8.0×10-4Pa	8.0×10-4Pa			8.0×10-4Pa	8.0×10-4Pa		8.0×10-4Pa			8.0×10-4Pa
Pumping speed	From 1 atm to 6.7×10-3Pa take 8~15min (room temperature, clean and unload)
Vacuum system	Diffusion pump + roots pump + rotary vane pump + holding pump (can be adjusted by requested)
Magnetron target type	Planar magnetron target, cylindrical magnetron target
Pulse bias power supply	25KW	25KW			30KW	30KW		40KW			40KW
Shelves rotation system	Planetary revolution and rotation, frequency control, upper and base rotation shelves, number of axes equipped by requested.
Process gas	Mass flow controller (3-4 ways), manual or automatic processing gas systems
Cooling system	Water-cooling system. Cooling water tower, industrial cooling water machine or deep water cooling system is needed to purchase separately. ( or supplied by user)
Control system	Manual or PLC + touch screen
Alarm and protection	Water pressure alarm, air pressure alarm, over current protection, execution on related protective measures and electrical interlock systems.
Foot print	W3m× L3.5m		W3m× L3.5m	W3.5m× L5m			W3.5m× L5m		W4.5m× L5.5m	W4.5m× L5.5m
Other technical data	Water pressure≥0.2MPa, water temperature≤25℃, air pressure 0.5-0.8MPa
Remarks	Specific size can be designed by user’s requested. Customizable vacuum chamber size range: 500-3000mm, H: 500-3000mm.