Product Name
Vacuum magnetron sputtering coating machine
Product Profile
Vacuum magnetron sputtering coating machine is widely used in household appliances, clocks,lamps, crafts, toys, light reflector, phone keypad outer covering, instrumentation, plastics, glass, ceramics, tiles, decorative film and functional film.Our company’s magnetron sputtering coating machine has many advantages such as good controllability and repeatability for film thickness, strong adhesion between substrate and film, special material film coating, mixed film,compound film and TiN imitation gold film making by different materials sputtering on products’ surface at the same time,high purity films etc..
Technical Specification
Type | CK-700 | CK-900 | CK-1000 | CK-1250 | CK-1400 | CK-1600 | |||||
Vacuum chamber size | 700×H 900mm | 900×H 1100mm | 1000×H 1200mm | 1250×H 1350mm | 1400×H 1600mm | 1600×H 1800mm | |||||
Power supply | Pulse bias power supply; DC magnetron power supply (can be equipped with different power supply by requested) | ||||||||||
Vacuum chamber structure | Vertical single/double door, rear vacuum acquisition system | ||||||||||
Vacuum chamber material | SUS-304 superior stainless steel | ||||||||||
Ultimate vacuum | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | 8.0×10-4Pa | |||||
Pumping speed | From 1 atm to 6.7×10-3Pa take 8~15min (room temperature, clean and unload) | ||||||||||
Vacuum system | Diffusion pump + roots pump + rotary vane pump + holding pump (can be adjusted by requested) | ||||||||||
Magnetron target type | Planar magnetron target, cylindrical magnetron target | ||||||||||
Pulse bias power supply | 25KW | 25KW | 30KW | 30KW | 40KW | 40KW | |||||
Shelves rotation system | Planetary revolution and rotation, frequency control, upper and base rotation shelves, number of axes equipped by requested. | ||||||||||
Process gas | Mass flow controller (3-4 ways), manual or automatic processing gas systems | ||||||||||
Cooling system | Water-cooling system. Cooling water tower, industrial cooling water machine or deep water cooling system is needed to purchase separately. ( or supplied by user) | ||||||||||
Control system | Manual or PLC + touch screen | ||||||||||
Alarm and protection | Water pressure alarm, air pressure alarm, over current protection, execution on related protective measures and electrical interlock systems. | ||||||||||
Foot print | W3m× L3.5m | W3m× L3.5m | W3.5m× L5m | W3.5m× L5m | W4.5m× L5.5m | W4.5m× L5.5m | |||||
Other technical data | Water pressure≥0.2MPa, water temperature≤25℃, air pressure 0.5-0.8MPa | ||||||||||
Remarks | Specific size can be designed by user’s requested. Customizable vacuum chamber size range: 500-3000mm, H: 500-3000mm. | ||||||||||
