Product Details

Product Name

Multi-function intermediate frequency coating machine

Product Profile

The product is applicable to coating metal films, alloy films, chemical films, super hardness wear-resistant films, anti-corrosion films decoration films and other different kinds of films. (Gold, silver, black, red, blue, green and other colors are available). Combined with magnetron sputtering technology, it can coating multilayer films, which apply to hardware tool, glass crafts, ceramic crafts etc. (watches, metal outer covering, sanitary ware, mold, electronic products, crystal glass, eyeglass frame, tableware, knives and so on). In recent years, electric arc ion coating technology has been greatly developed from the original single arc source to the column arc and large flat arc etc. The combination with the technology of intermediate frequency(IF) magnetron sputtering makes it far more popular.

Technical Specification

Type

ZP-700

ZP-900

ZP-1000

ZP-1250

ZP-1400

ZP-1600

Vacuum chamber size

700×H

900mm

900×H

1100mm

1000×H

1200mm

1250×H

1350mm

1400×H

1600mm

1600×H

1800mm

Power supply

Intermediate frequency power supply; pulse bias power supply; arc power supply

Vacuum chamber structure

Vertical single/double door, rear vacuum acquisition system

Vacuum chamber material

SUS-304 superior stainless steel

Ultimate vacuum

8.0×10-4Pa

Pumping speed

From 1 atm to 6.7×10-3Pa take 8~15min (room temperature, clean and unload)

Vacuum system

Diffusion pump + roots pump + rotary vane pump + holding pump (can be adjusted by requested)

Magnetron target

Type

Cylindrical magnetron target, twin magnetron opposite target

Number

Equipped by different coating processing or by user’s requested.

Shelves rotation system

Planetary revolution and rotation, frequency control, upper and base rotation shelves, number of axes equipped by requested.

Process gas

Mass flow controller (3-4 ways), manual or automatic processing gas systems

Cooling system

Water-cooling system. Cooling water tower, industrial cooling water machine or deep water cooling system is needed to purchase separately. ( or supplied by user)

Control system

Manual or PLC + touch screen

Alarm and protection

Water pressure alarm, air pressure alarm, over current protection, execution on related protective measures and electrical interlock systems.

Foot print

W3m×L3.5m

W3.5m×L5m

W4.5m×L6m

W5m×L6m

Other technical data

Water pressure≥0.2MPa, water temperature≤25℃, air pressure 0.5-0.8MPa

Remarks