Specifications

compact and low cost plasma cleaner which is designed to clean and remove nanoscale organic contamination

• McIntire, Theresa M., S. Rachelle Smalley, John T. Newberg, A. Scott Lea, John C. Hemminger, Barbara J. Finlayson-Pitts. "Substrate Changes Associated with the Chemistry of Self-Assembled Monolayers on Silicon." Langmuir (2006) 22(13): 5617-5624.
• Sumner, Ann Louise, Erik J. Menke, Yael Dubowski, John T. Newberg, Reginald M. Penner, John C. Hemminger, Lisa M. Wingen, Theo Brauers, Barbara J. Finlayson-Pitts. "The Nature of Water on Surfaces of Laboratory Systems and Implications for Heterogeneous Chemistry in the Troposphere." Phys. Chem. Chem. Phys. (2004) 6: 604-613.
• Mennicke, Ulrike, Tim Salditt. "Preparation of Solid-Supported Lipid Bilayers by Spin-Coating." Langmuir (2002) 18: 8172-8177

Input Power	AC 110V (for operation under AC220V, we provide additional 500W transformer),  please select in option bar
RF Power	RF power (High voltage & high frequency current applied on the coil) is adjustable at three levels: Low Setting 680V  10 mA  6.8W Medium Setting 700V  15 mA  10.5W High Setting 720V  25 mA  18W
Features	Compact, tabletop unit Adjustable RF power Low, Medium, and High power settings High purity 3" quartz chamber Safe operation at low cost and environmental freindly
Plasma Chamber	3" diameter x 6.5" length   high purity quartz chamber A removable front cover assembly
Vacuum Pump and Valve	Double Step Rotary Vane Vacuum Pump (110V, 226 L/m) with Exhaust Filter  -  EQ-2TW-4C is included with pipe for AC110V voltage; 120 L/m  Rotary Vane  Vacuum Pump with Oil Trap, Exhaust Filter -EQ-2XZ is included with pipe for AC220V voltage. (Ultimate total pressure of 30 mTorr. Only one vacuum pump is included  in one package) 1/8" NPT needle valve to qualitatively control gas flow and chamber pressure. 1/8" NPT 3-way valve to quickly switch from bleeding in gas, isolating the  chamber, and venting.
Inert gas	Many inert gases can be choosen for plasma cleaning, such as N2, Ar , Air and Mixed gas depended on what kind material will be treated. ( not included in the package) No flammable gas shall be used for the plasma cleaner.
Overall dimension	8.5" H x 10" W x 8" D
Net Weight	17 Lbs without pump 37 Lbs with vacuum pump

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Zhengzhou Kejia Furnace Co., Ltd.
Tel.: +86-371-67826992