Product Details

VTC-600-2HD DC/RF Dual-Head High Vacuum 2” Magnetron Plasma Sputtering Coater

Introduction of magnetron plasma sputtering coater

VTC-600-2HD is a magnetron sputtering system featuring dual target sources: 1) DC source for coating metallic material on

one head and 2) RF source for coating non-metallic material on the other head. It is equipped with a film thickness tracker to enable the user to easily monitor the coating progress and also record the data.
This model is sophsticatedly designed for coating single or multiple film layers of a wide range of substrate materials (ferroelectric, condutive, alloy, semiconductor, ceramic, dielectric, optical, oxide, hard, PTFE and etc). Its compactness and ease of operation make it an ideal coating system for use in R&D labs.

Technical parameters of Magnetron Plasma Sputtering Coater

Technical parameters of magnetron plasma sputtering coater

Compact Structure
Input Power	220VAC 50/60Hz, single phase 2000W (including pump)
Source Power	Two sputtering power sources are integrated into one control box DC source: 500W for coating metallic materials ( below left) RF source: 600W with automatching for coating non-metallic materials ( Center) Compact 300 RF source is available at extra cost ( Below right)
Magnetron Sputtering Head	Two 2" Magnetron Sputtering Heads with water cooling jackets are included 1)One is connected to RF power supply for no-conductive materials 2)Another is connected to DC sputtering power source for coating metallic materials Target size requirement: 2" diameter 1)1/16" max. thickness for metallic targets 2)1/4" max. thickness for no-conductive targets 3)One stainless steel and one Al2O3 ceramic targets are included for demo testing Head Water Cooling: 10ml/min water flow required, and one 16ml/min digitally controlled recirculating water chiller is included for cooling both magnetron sputtering heads
Vacuum Chamber	Vacuum Chamber: 300 mm Dia x 300 mm height, made of stainless steel Observation Window: 100 mm diameter Hinged type cover on top with air spring sport makes target exchange easy
Sample Holder	Sample holder size: 140mm dia. for. 4" wafer max Sample holder rotation speed is adjustable: 1 - 20 rpm for uniform coating The holder temperature is adjustable from RT to 500°C Max with accuracy +/- 1.0 °C
Gas Flow Control	Two precision digital MFC (mass flow controller) are installed to allow two types of gases to be filled in Flow rate: 200 ml/min max. Flow rate is adjustable on the 6" touch screen control panel
Vacuum Pump Station	High speed turbo vacuum pump system (made in Germany) is directly installed on the vacuum chamber for max. vacuum level Heavy duty dual stage mechanical pump is connected to turbo pump for faster pump speed Mobile pump station is included and the compact sputtering coater can be put on top of station Max. vacuum level: 10^-6 torr with chamber baking
Thickness Monitor	One Precision quartz thickness sensor is built into the chamber to monitor coating thickness with accuracy 0.10 Å LED Display Unit outside chamber can: 1)Input material to be coated according to data base included 2)Display total thickness coated and coating speed 5 pcs quartz sensors (consumable) are included Water cooling is required
Overall Dimensions	L1300mm× W660mm× H1200mm

Company Information

Zhengzhou CY Scientific Instrument Co.,Ltd locate in hi-tech zone, Zhengzhou city.It is a high-tech companies that engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches.Mainly focus on Our main products include:microwave sintering furnace, dental porcelain furnace, tube furnace,muffle furnace,,zirconia sintering furnace,Phosphor powder sintering furnace,crystal sintering furnace, battery material sintering furnace, CVD system, relative accessories and etc. determined to do advanced materials preparation equipment manufacturers and suppliers of leader.

We sincerely welcome you come to visit us. Your comments and suggestions will be great honor for us.

FAQ

1. Are you a manufacturer or trade company ?

Yes,you can assured that we are a producer with full experience doing business

in domestic and oversea.

2. We are not professional for operation and installation of your machine?

While it is not a stumbling block,our machine is easy to operate,no need to professional

training,and the instruction manual and vedio sent to you are enough.What’s more,we

have professional engineers and they can solve all questions.

3. How about packaging ?………….if machine damaged,what should I do ?

Usually machine is packed with wooden case and standard export carton,plywood

carton or as your requirement.Damage haven’t happened before,if happen,we will