Part name

Specification 

Vacuum chamber

        ø1600mm×H1800mm SUS304

           vertical with double doors

Lining board

       0.6mm, SUS304

Rotation system of workpiece

           Frequency regulation

Magnetron sputtering target

        Stainless steel(L=1950mm)

Sputtering Power Supply

              50kw

Gas Flow meter

             D07-7C Series

Flow Control Instrument

             D07-7C Series

Vacuum gauge

           ZDF-5227

  valve

Main valve

              GDQ-900

Rough valve

              GDQ-200

Front valve

             GDQ-200

Vacuum 

System 

Diffusion pump

               KT-900

Mechanical pump

              H-150

Roots pump

           ZJY-1200A

Holding pump

              2X-30

Intelligent program

           PLC controlled+HMI  

Electric element 

         Standard equipment

Man-machine interaction

              Color touch screen

Pump  speed

              5×10-²pa≤4mins

Ultimate vacuum

                 5×10-4pa