CICEL MAGNETRON SPUTTERING VACUUM COATING MACHINE
USD $50,000 - $150,000 /Set
Min.Order:1 Set
Wenzhou Cicel Vacuum Machine Co., Ltd.
CICELCCZK SF Magnetron sputtering coating Machine with high deposition rate, low temperature of substrate , well adhesion , and can achieve large area coating.
1)Compared with traditional evaporation coating equipment, Cicel magnetron sputtering coating can obtain more excellent density, uniformity and adhesion for the coating film.
2)Adopted the most advanced direct current or frequenc magnetron sputtering power, the machine could satisfy the customer’s requirements of different levels.
3)Equipped with latest developed planar magnetron target, centre rotation cylindrical target, twins targets, etc.
5)Advanced high speed and low temperature sputtering technology, infinitely expand the application range of Cicel CCZK-SF magnetron sputtering equipment and provide good quality coating solution for incapable heating products.
6)Perfect combination of intelligence industry PLC controller and touch system HMI makes operation become simple and in order.
Main configuration
Part name | Specification | Supplier | Qty. | |
Vacuum chamber | ø1600mm×H1800mm SUS304 vertical with double doors | CICEL | 1set | |
Lining board | 0.6mm, SUS304 | CICEL | 1set | |
Rotation system of workpiece | Frequency regulation | CICEL | 1set | |
Magnetron sputtering target | Stainless steel(L=1950mm) | CICEL | 2sets | |
Sputtering Power Supply | 50kw | GUANGDONG | 2sets | |
Gas Flow meter | D07-7C Series | Sevenstar | 2sets | |
Flow Control Instrument | D07-7C Series | Sevenstar | 1 set | |
Vacuum gauge | ZDF-5227 | SICHUAN | 1set | |
valve | Main valve | GDQ-900 | CICEL | 1set |
Rough valve | GDQ-200 | CICEL | 1set | |
Front valve | GDQ-200 | CICEL | 1set | |
Vacuum System | Diffusion pump | KT-900 | CICEL | 1set |
Mechanical pump | H-150 | TAIZHOU | 1set | |
Roots pump | ZJY-1200A | SHANGHAI | 1set | |
Holding pump | 2X-30 | SICHUAN | 1set | |
Intelligent program | PLC controlled+HMI | MITSUBISHI | 1set | |
Electric element | Standard equipment | OMRON | 1set | |
Man-machine interaction | Color touch screen | MITSUBISHI | 1set | |
Pump speed | 5×10-²pa≤4mins | Clean idle oven(no-load ) | ||
Ultimate vacuum | 5×1-4pa |
WENZHOU CICEL VACUUM MACHINE CO.,LTD.
Rosa chen sales manager
EMAIL: export-a2@ccvacuum.com
WEB:
FAX:0577-56615100
TEL:0577-86739805 13857737962