Product Details

Specifications

1.Certified ISO9001
2.Nice after-sales service
3.Strong technology support
4.Size can be customized
5.warranty: 1 year

Desription:

This machine is mainly used for plating various films such as transparency enhanced film, spectroscopic film, band pass film/cutoff film, and high reflection film. It can plate a super large film system with 100 lays of film, and a transparency enhanced film with various colors, a reflection film with a red, yellow, blue, green or rainbow color.

Main Features:

1. This machine is equipped with a super big crucible electronic gun. In the entire evaporation process the film surface is flat and evaporation distribution is even.

2. This machine is equipped with a quartz crystal film thickness control instrument to control the film forming speed and metallization process automatically.

3. This machine is equipped with a high power ion source to produce a film thickness with good quality.

4. The overall structure is rationally designed to better satisfy the process requirements. The vacuum system is automatically controlled by PLC for convenient operation.

5. The vacuum operating system is protected with an interlock. The diffusion pump has water cutoff and phase loss alarm functions.

6. Touch screen and PLC automatic control are used to set parameters of main components of the entire machine, to monitor the running of this machine at real time, and to diagnose faults intelligently.

Main Configuration:

1. The vacuum chamber is a vertical type boxed structure with a front door; the box is completely made of stainless steel; dimensions of the internal cavity are Φ1200mm*1200mm.

2. Vacuum System Configuration: with molecular pump(or diffusion pump), Roots pump, mechanical pumps.

3. Deep Cooling System with a Fast Cycle Water Vapor Cryopump

4. Work Piece Rack is an integrated arched shape work piece, can be customized according to the customer.

5. Coating system is equipped with one or two sets of high power e-type 270°magnetic deflection electronic gun scanning in XY directions. The auxiliary metallization system is equipped with a Holl ion source.

6. Baking: Digitally displayed and automatically controlled with a temperature control precision of ±1.5.

7. The film thickness monitoring system can control evaporation rate of the electronic gun. The optical film thickness monitoring system, in which the wave length is controlled within the range of 200-900nm .

8. Control System: The vacuum is controlled by a 10.4 inches color touch screen coupled with a programmable logic controller. The vacuum and coating process are controlled fully automatically.

Technical Parameters:

Technical indexes and parameters:

1. Vacuum chamber: 1350mm×1350mm

2. Vacuum degree: (ultimate vacuum) 8×10^-4 Pa(clean vessel, idle load)

3. Pumping speed: 5×10^-2≤5min (clean vessel, idle load)

4. Evaporation power:380V/12V 10KW

6. Total power: 380V 50Hz 42KW (max. 52KW within short time)

7. Total water volume: 0.2Mpa 3m³/h

8. Total gas volume: 0.4-0.8Mpa