Type

JYDC-0910

JYDC -1012

JYDC -12 13

JYDC -12 16

Coating Methods

3 electric-arc+

2 pairs of plane rectangular cathode

6 electric-arc+

2 pairs of cylindrical cathode+

a pairs of plane rectangular cathode

5 electric-arc+

4 pairs of cylindrical cathode+

a pairs of plane rectangular cathode

6 electric-arc+

8 pairs of cylindrical cathode+

a pairs of plane rectangular cathode

Dimension of the Vacuum chamber

Q900mm 1000mm

Q1000mm 1100mm

Q1200mm 1300mm

Q1200mm 1600mm

Film Types

 Metal films, Dielectric films, Compound films, Reaction films,

 Muti-layer function films

Power Supply

Electric arc power supply, DC magnetron power supply, MF magnetron power supply, Pulse bias voltage power supply, ion source power supply

Structure of

Vacuum chamber

Pre-open vertical (single) door, postposition pump system, double water-cooling

Vacuum systems

Molecule pump(diffusion pump)+ Roots pump+ Mechanical pump

Ultimate vacuum

5*10^-5Pa

Pumping Speed

Pumping time less than 15 minutes, from atmospheric pressure to 3*10^-3Pa

Movement of the workpiece

 Revolution/rotation, variable frequency speed adjustable

Baking temperature of the workpiece

Adjustable and controllable from room temperature to 350,

radiation heating

Control Mode

Full automation control system PC+ PLC/PC+ HMI

Remark

We can design the machine according to your workpiece and special technological requirement