Product Details

The electron beam vacuum coating machine

Optical coating machine equips multi pieces of sectors or single arc-shaped part. It can coat multi-layers like optical filter, reduce anti-reflective film on viewing window or spectrum element that applied to optical instruments optical lens. Touching screen + PLC and fully automatic crystal film thickness controller make up the fully automatic controlling system that can realize parameter input, process monitoring and data saving. Technological process can be set and operates automatically. It can improve the quality of film layers which manual operating machine cant do.

It is suitable for coating antireflection coating, optical filter, multicolor, red, yellow, green and blue on optics lens, electronics, acrylic, glass, lamps, mobile viewing window, glasses, lighting.

Parameter Specification

Model	JYGX-800	JYGX-900	JYGX-1100	JYGX-1300	JYGX-13500
Chamber Size	800×900	1050×1200	1100×1300	1300×1300	1350×1500
Coating Film Type	Optical antireflection film, AR, broadband antireflection, single-point antireflection, optical filter and decorative film
Fixture	4 pieces of arc-shaped fixtures, single arc-shaped plate revolution, 3 pieces of plates planet rotation and revolution, 12 shafts rotation and revolution (horizontal)
Vacuum Chamber Structure	vertical / horizontal (304 stainless steel), vacuum system post positioned
Vacuum System	slide valve pump(rotary pump), roots pump, diffusion pump, maintaining pump (optional: molecular pump, deep cold pump, deep cold system)
Heating System	heated by heating tube, PID control, the max temperature: 350 degrees
Inflation System	mass flow controller & electric magnetic valve
Electric Gun	Electric gun 4 round shaped crucibles and a U shaped crucible, high voltage 4KV-8KV adjustable. Triangle wave, sine-wave and rectangle wave scanning are optional.
Resistance Evaporation Source	2 groups of resistance evaporation source
Ion Source	power 2KW, max anode current 6A. double filaments which increase the attaching force, density and reflective index of film layer (Kerr)
Crystal Film Thickness Controller	crystal film thickness controller SQC-310(America)and PLC make up the fully automatic pumping and E-beam evaporation system.
Ultimate Vacuum	8×10⁴paclean and unloaded
Pump Time	From atmosphere to 5×10³pa less than 15 minutes
Controlling Method	manual, semi-automatic, fully automatic / touching screen & PLC
Remark	Can be designed according to customers request