Key Specifications/Special Features:
High-Speed Miniature Piezo Tilt Mirror
P22 miniature tilt platforms(θx)
Characteristics:
Sub-mrad resolution
Sub-millisecond response
Up to 3.6 mrad optical beam deflection
Closed-loop versions for better linearity
Zero friction flexure guiding system
Technical Data:
Models: P22.U3S, P22.U3K
Active axes: θx
Integrated sensor: SGS
Tilt angle(0~120V): 2.8 mrad ±20%
Max tilt angle(-20~+150V):4 mrad±20%
Tilt resolution: 0.3/0.1 urad Typ.
Linearity θx: 0.15 %F.S. Typ.
Repeatability θx: 0.1 %F.S. Typ.
Unloaded response frequency(θx): 3 kHz ±20%
Electrical capacitance: 1.8 uF ±20%
Material:N-S
Weight:80 g ±5%
Cable length: 1.5 m ±10mm
Model | P22.U3S P22.U3K | Units |
Active axes | θX | |
Sensor | SGS/- | |
Nominal tilt angle(0 ~+120 V) | 2.5 | mrad±20% |
Max. tilt angle(-20~+150 V) | 4 | mrad±20% |
Resolution | 0.3/0.1 | urad |
Closed-loop linearity | 0.3/- | %F.S. |
Repeatability | 0.15/- | %F.S. |
El.capacitance | 1.8 | μF±20% |
Unloaded resonant frequency | 3 | kHz±20% |
Resonant frequency(Φ15x10mm glass) | 1 | kHz±20% |
Material | Steel | |
Weight | 80 | g±5% |
Cable length | 1.5 | m±10mm |
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