Key Specifications/Special Features:
XP-721 Piezo Flexure Objective Scanner
Applications:
Scanning Interferometry
Surface structure analysis
Disc-drive-test
Autofocus systems
Confocal microscopy
Biotechnology
Semiconductor testing
XP-721 is high-speed, piezo-driven microscope objective nanofocusing/scanning devices, providing a positioning and scanning range of 110 um with sub-nanometer resolution and very high motion of linearity.
Technical Data:
Types: XP-721.S, XP-721.K
Active axes:Z
Integrated sensor: SGS
Travel range(0~150V): 80 um±20%
Max travel range: 110 um±20%
Resolution: 10 or 3 nm
Linearity, closed-loop: 0.2 %F.S.
Repeatability: 0.1 %F.S.
Stiffness in motion direction: 0.3 N/um±20%
Unloaded resonant frequency: 600 Hz±20%
Resonant frequency @ 120g: 250Hz±20%
Resonant frequency @200g: 200 Hz±20%
Push/pull force capacity in motion direction: 100/20 N
Electrical capacitance: 3.6 uF±20%
Material: Al
Mass: 0.25 kg
XP-721.S Piezo Flexure Objective Scanner is equipped with high-accuracy SGS sensor, has very high resolution and positioning resolution, and can scan fast to position within 100um travel. Fast response, compact structure, stability, free of friction and easy installation with a variety of thread interface, which can be conveniently connected with various specifications lens.
Models XP-721.SXP-721.K Units
Active axes Z
Sensor SGS/-
Nominal displacement(0~+120V) 80 μm±20%
Max. displacement(-20~+150V) 110 μm±20%
Resolution 10/3 nm
Closed-loop linearity 0.2/- %F.S.
Repeatability 0.1/- %F.S.
Stiffness in motion direction 0.3 N/μm±20%
Unloaded resonant frequency 500 Hz±20%
Resonant frequency @ 120g 250 Hz±20%
Resonant frequency @ 200g 200 Hz±20%
Push / pull force capacity 100/20 N
El.capacitance 3.6 μF±20%
Material Al
Weight 250 g±5%
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