Three-Heads Compact 2” Magnetron Plasma Sputtering Coater/magnetron sputtering machine
magnetron sputtering machine
Introduction of magnetron sputtering machine
VTC-600-3HD is a 3-heads compact 2“ magnetron sputtering system with optional power source: DC supttering , RF supering, both RF and DC supttering, which allows researcher doing all types of thin film coating in one machine A film thickness tracker is included to enable the user to control processing easily. This coateo is suitable for coating multiple layer film of a wide range of material,such as ferroelectric, alloy, semiconductor, ceramic, dielectric, optical, oxide, hard, PTFE etc. at affordable cost.
Technical Parameters of magnetron sputtering machine
magnetron sputtering machine
Compact Structure |
|
Input Power | 220VAC 50/60Hz, single phase 2000W (including pump) |
Source Power | The power source is optional with single DC power source, single RF power source or both DC and RF power source. (Please select it in the option bar) DC source: 500W for coating metallic materials ( below left) Compact 300 RF source for non-conductive materials ( Below right)
|
Magnetron Sputtering Head | Three 2" Magnetron Sputtering Heads with water cooling jackets are included ( click picture-left to see detailed specs ) to connect optional power source Head Water Cooling: 10ml/min water flow required
|
Vacuum Chamber | Vacuum Chamber: 300 mm Dia x 300 mm height, made of stainless steel Observation Window: 100 mm diameter Hinged type cover on top with air spring sport makes target exchange easy
|
Sample Holder | Sample holder size: 140mm dia. for. 4" wafer max Sample holder rotation speed is adjustable: 1 - 20 rpm for uniform coating The holder temperature is adjustable from RT to 500°C Max with accuracy +/- 1.0 °C
|
Gas Flow Control
| Two precision digital MFC (mass flow controller) are installed to allow two types of gases to be filled in Flow rate: 200 ml/min max. Flow rate is adjustable on the 6" touch screen control panel |
Vacuum Pump Station | 1.High speed turbo vacuum pump system (made in Germany) is directly installed on the vacuum chamber for max. vacuum level 2.Heavy duty dual stage mechanical pump is connected to turbo pump for faster pump speed 3.Mobile pump station is included and the compact sputtering coater can be put on top of station 4.Max. vacuum level: 10^-6 torr with chamber baking |
Thickness Monitor | 1.One Precision quartz thickness sensor is built into the chamber to monitor coating thickness with accuracy 0.10 Å
Input material to be coated according to data base included Display total thickness coated and coating speed 3.5 pcs quartz sensors (consumable) are included 4.Water cooling is required |
Overall Dimensions | L1300mm× W660mm× H1200mm |
Net Weight | 160 kg |
Warranty | One years limited warranty with lifetime support |
Thickness monitor for magentron sputtering machine
Vacuum pump for magentron sputtering machine/system
Other types of magnetron sputtering machine
1.One year free warranty.
2.All machines are debugged before shipment.
3.Lifetime technical support and service.
4.24 hours on line or phone or by email technical support.
5.We offer detailed machine manual and software manual.
6.Our factory make a vivid training CD.
7.Life-long free maintenance.
8.Free training in our factory.
Welcome to visit our factory, learn machine face to face.
24-hours online service makes your inquiry be reply immediately.
Zhengzhou CY Scientific Instrument Co.,Ltd locate in hi-tech zone, Zhengzhou city.It is a high-tech companies that engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches.Mainly focus on Our main products include:microwave sintering furnace, dental porcelain furnace, tube furnace,muffle furnace,,zirconia sintering furnace,Phosphor powder sintering furnace,crystal sintering furnace, battery material sintering furnace, CVD system, relative accessories and etc. determined to do advanced materials preparation equipment manufacturers and suppliers of leader.